Share Email Print

Proceedings Paper

Comparison Of Interferometric Contouring Techniques
Author(s): Katherine Creath; James C. Wyant
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Projected fringe contouring, projection moire, shadow moire, and two-angle holographic contouring all measure surface height relative to a reference surface. A single theory can be used to describe all of these techniques. This paper compares these techniques with each other and with conventional interferometry. Quantitative data are obtained from projected fringe contouring and two-angle holographic contouring using phase-measurement interferometry techniques with a surface height measurement repeatability of 1/50 of the contour interval rms.

Paper Details

Date Published: 16 January 1989
PDF: 9 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947587
Show Author Affiliations
Katherine Creath, WYKO Corporation (United States)
James C. Wyant, WYKO Corporation (United States)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

© SPIE. Terms of Use
Back to Top