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Proceedings Paper

Optical Profiling Using An Interference Microscope
Author(s): B. Cencic; M. Barut; P. Langenbeck
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Paper Abstract

An interference microscope enables visual inspection of optically smooth surfaces in order to obtain quantitative data on surface roughness, size and depth of defects. We modified such an instrument into a phase-shifting interferometer. Some measurement results are presented and commented.

Paper Details

Date Published: 16 January 1989
PDF: 9 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947579
Show Author Affiliations
B. Cencic, Iskra Electro-Optic Center (Yugoslavia)
M. Barut, Iskra Electro-Optic Center (Yugoslavia)
P. Langenbeck, Ingenieur-Agentur fur Neue Technologie in Optikund Precision Engineering (Germany)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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