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Proceedings Paper

Scan Interferometer
Author(s): P. Langenbeck; P. Gerspacher; D. Muller
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Paper Abstract

Combining surface interferometry of limited aperture with automatic evaluation by phase shift and with ultra precision kinematics allows to scan large surfaces or bodies of revolution and produce a composed interferogram covering the entire surface.

Paper Details

Date Published: 16 January 1989
PDF: 5 pages
Proc. SPIE 0954, Optical Testing and Metrology II, (16 January 1989); doi: 10.1117/12.947574
Show Author Affiliations
P. Langenbeck, Agentur fur Neue Technologie in Optik and Precision Engineering (Germany)
P. Gerspacher, Labor Dr. Breuckmann (Germany)
D. Muller, Syntec GmbH (Germany)

Published in SPIE Proceedings Vol. 0954:
Optical Testing and Metrology II
Chander Prakash Grover, Editor(s)

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