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Proceedings Paper

Reflective Channel Waveguide Integrated Optic Components In Ti: LiNbO3 By Ion-Beam Micromachining
Author(s): R. R. A. Syms; R. E. J. Watkins; M. Robinson
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Paper Abstract

Focussed ion beam micromachining is a new maskless process that may be used to fabricate deep (>10 µm) features in LiNb03. This is advantageous, because LiNb03 is difficult to etch selectively otherwise. Features in the form of trenches, cut accurately orthogonal to titanium-diffused channel waveguides, may be used as rugged on-chip mirrors for channel waveguide integrated optics. These may be combined with other waveguide components to form direct reflectors, reflective bends, and electro-optically switchable track-changing reflectors. Experimental data on all three devices are given.

Paper Details

Date Published: 21 September 1988
PDF: 9 pages
Proc. SPIE 0949, Fibre Optics '88, (21 September 1988); doi: 10.1117/12.947523
Show Author Affiliations
R. R. A. Syms, Imperial College (England)
R. E. J. Watkins, Dept. of Engineering Science (England)
M. Robinson, Consultant to Dept. of Engineering Science (England)

Published in SPIE Proceedings Vol. 0949:
Fibre Optics '88
Lionel R. Baker, Editor(s)

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