Share Email Print
cover

Proceedings Paper

A Computer-Controlled Experimental FIB System
Author(s): T. Kato; K. Saitoh; Y. Watakabe
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A focused-ion-beam writing system for experimental use will be described. This system was designed to be simple and to be flexible enough for doing experiments. The system configuration, ion sources, and some considerations regarding alignment signals will be mentioned.

Paper Details

Date Published: 20 June 1985
PDF: 8 pages
Proc. SPIE 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV, (20 June 1985); doi: 10.1117/12.947495
Show Author Affiliations
T. Kato, Mitsubishi Electric Corporation (Japan)
K. Saitoh, Mitsubishi Electric Corporation (Japan)
Y. Watakabe, Mitsubishi Electric Corporation (Japan)


Published in SPIE Proceedings Vol. 0537:
Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV
Phillip D. Blais, Editor(s)

© SPIE. Terms of Use
Back to Top