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Proceedings Paper

Preparation Of Ion Beam Sputtered Superconducting Y-Ba-Cu-O Thin Films
Author(s): Kazuki Yoshimura; Shuuichi Nogawa; Sakae Tanemura
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Paper Abstract

By using ion beam sputtering, the high quality Y-Ba-Cu-O superconducting films were successfully prepared. The superconducting behavior of the films strongly depended on the annealing temperature. The extensive characterization of the prepared films were carried out by measuring the temperature dependence of the resistivity, X-ray diffractometry, electron diffractometry, SEM image, EPMA spectra and XPS spectra.

Paper Details

Date Published: 23 August 1988
PDF: 5 pages
Proc. SPIE 0948, High-Tc Superconductivity: Thin Films and Devices, (23 August 1988); doi: 10.1117/12.947477
Show Author Affiliations
Kazuki Yoshimura, Government Industrial Research Institute (Japan)
Shuuichi Nogawa, Nisshin Electric Corp. Ltd. (Japan)
Sakae Tanemura, Government Industrial Research Institute (Japan)

Published in SPIE Proceedings Vol. 0948:
High-Tc Superconductivity: Thin Films and Devices
Cheng-Chung John Chi; R. Bruce van Dover, Editor(s)

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