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Proceedings Paper

Modulation Spectroscopy Of Semiconductor Microstructures: An Overview
Author(s): Fred H. Pollak; O. J. Glembocki
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Paper Abstract

Modulation spectroscopy utilizes a general principle of experimental physics, in which a periodically applied perturbation either to the probe or the sample leads to derivative-like features in the optical response of the sample. We review the application of the modulation techniques of electroreflectance, photoreflectance and piezomodulation to microstructure such as quantum wells, superlattices and modulation doped heterojunctions. It is shown that modulation spectroscopy is a powerful set of optical tools for the characterization of microstructures.

Paper Details

Date Published: 9 August 1988
PDF: 34 pages
Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); doi: 10.1117/12.947409
Show Author Affiliations
Fred H. Pollak, Brooklyn College of CUNY (United States)
O. J. Glembocki, U.S. Naval Research Laboratory (United States)


Published in SPIE Proceedings Vol. 0946:
Spectroscopic Characterization Techniques for Semiconductor Technology III
Orest J. Glembocki; Fred H. Pollak; Fernando A. Ponce, Editor(s)

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