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Proceedings Paper

Nanofabrication Of Quantum Coupled Devices
Author(s): J. N. Randall; M. A. Reed; R. J. Matyi; T. M. Moore; R. J. Aggarwal; A. E. Wetsel
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Paper Abstract

A new generation of integrated circuits is foreseen in which quantum dots with discrete electronic states are used to construct logic and memory elements. Successful implementation of this technology will require significant improvements in semiconductor processing technology.

Paper Details

Date Published: 16 August 1988
PDF: 9 pages
Proc. SPIE 0945, Advanced Processing of Semiconductor Devices II, (16 August 1988); doi: 10.1117/12.947402
Show Author Affiliations
J. N. Randall, Texas Instruments (United States)
M. A. Reed, Texas Instruments (United States)
R. J. Matyi, Texas Instruments (United States)
T. M. Moore, Texas Instruments (United States)
R. J. Aggarwal, Texas Instruments (United States)
A. E. Wetsel, Texas Instruments (United States)


Published in SPIE Proceedings Vol. 0945:
Advanced Processing of Semiconductor Devices II
Harold G. Craighead; Jagdish Narayan, Editor(s)

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