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Proceedings Paper

Superfine Laser Position Control Using Statistically Enhanced Resolution In Real Time
Author(s): B. L. Kortegaard
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Paper Abstract

An electronic control system is described which analyzes digitized TV images to simultaneously position 96 time-and-space multiplexed beams for a large KrF laser system. Degra-dation of position resolution due to the intervals between digitization is discussed, and improvement of this resolution by using inherent system noise is demonstrated. The methods shown resolve arbitrary intensity boundaries to a small fraction of the discrete sample spacing.

Paper Details

Date Published: 11 July 1985
PDF: 13 pages
Proc. SPIE 0534, Architectures and Algorithms for Digital Image Processing II, (11 July 1985); doi: 10.1117/12.946576
Show Author Affiliations
B. L. Kortegaard, University of California (United States)

Published in SPIE Proceedings Vol. 0534:
Architectures and Algorithms for Digital Image Processing II
Francis J. Corbett, Editor(s)

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