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Proceedings Paper

Using Six-Point Probe Meter Models 101 And 101C
Author(s): James T.C. Chen
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Paper Abstract

The concept of using the Six-Point-Probe Meter for various cases of sheet resistivity measurements is introduced, its principle is analyzed and the instructions for the applications are presented.

Paper Details

Date Published: 9 April 1985
PDF: 7 pages
Proc. SPIE 0530, Advanced Applications of Ion Implantation, (9 April 1985); doi: 10.1117/12.946489
Show Author Affiliations
James T.C. Chen, Four Dimensions, Inc. (United States)

Published in SPIE Proceedings Vol. 0530:
Advanced Applications of Ion Implantation
Michael I. Current; Devindra K. Sadana, Editor(s)

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