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Proceedings Paper

Hybrid Microelectronic Laser Machining Requirements
Author(s): Paul F. Parks
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Paper Abstract

Industrial application of lasers in the micro electronic industry is an established fact. The most prolific is in resistor trimming and ceramic substrate machining. Though the application has been applied since the 1960's there are still unresolved problems in the economic use of lasers in this area.

Paper Details

Date Published: 30 September 1985
PDF: 5 pages
Proc. SPIE 0527, Applications of High Power Lasers, (30 September 1985); doi: 10.1117/12.946395
Show Author Affiliations
Paul F. Parks, P/M Industries, Inc. (United States)

Published in SPIE Proceedings Vol. 0527:
Applications of High Power Lasers
Ralph R. Jacobs, Editor(s)

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