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Proceedings Paper

Present And Future Applications For Laser Processing Of Hybrids And Semiconductors
Author(s): Edward J. Swenson
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Paper Abstract

Present and future development of laser processing as a production technique for modifying semiconductor devices, improving yields, and decreasing developmbnt times are described. Current applications covered include thick-and thin-film resistor trimming, deposited film and polysilicon resistors on silicon trimming and redundant memory repair. Emerging applications include microcircuit mask making and capacitor trimming. Examples of processes still under development include selective annealing, minority-carrier lifetime doping, and device diagnostics by laser imaging.

Paper Details

Date Published: 30 September 1985
PDF: 6 pages
Proc. SPIE 0527, Applications of High Power Lasers, (30 September 1985); doi: 10.1117/12.946394
Show Author Affiliations
Edward J. Swenson, Electro Scientific Industries, Inc. (United States)


Published in SPIE Proceedings Vol. 0527:
Applications of High Power Lasers
Ralph R. Jacobs, Editor(s)

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