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Proceedings Paper

Optical Profilers For Surface Roughness
Author(s): James C. Wyant
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Paper Abstract

Different possible interferometers for surface roughness measurements are described. Advantages and disadvantages of optical techniques compared to stylus instruments are discussed. Important features of phase-shifting techniques for surface roughness measurements are given. The WYKO NCP-1000M optical profiler is described along with techniques for measuring surfaces having an rms roughness on the order of 0.1 nm.

Paper Details

Date Published: 3 September 1985
PDF: 7 pages
Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946361
Show Author Affiliations
James C. Wyant, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0525:
Measurement and Effects of Surface Defects & Quality of Polish
Lionel R. Baker; Harold E. Bennett, Editor(s)

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