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Proceedings Paper

A Schlieren Microscope
Author(s): G. Prast
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Paper Abstract

A Schlieren microscope is described which can be used to measure profiles of optical quality surfaces. The intensities in the image field are measured with a photo-diode array. By measuring a reference sample and the object, both with and without knife it is possible to correct for different errors. Shape and roughness can be measured with accuracies of 10 nm and 1 nm respectively with a horizontal resolution of about 3μm. The system is fast and relatively insensitive to vibra-tion.

Paper Details

Date Published: 3 September 1985
PDF: 3 pages
Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946359
Show Author Affiliations
G. Prast, Philips Research Laboratories (Netherlands)


Published in SPIE Proceedings Vol. 0525:
Measurement and Effects of Surface Defects & Quality of Polish
Lionel R. Baker; Harold E. Bennett, Editor(s)

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