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Proceedings Paper

Scanning Electron Microscopy Studies Of Laser Damage Initiating Defects In ZnSe/ThF[sub]4[/sub] And SiH/Si0[sub]2[/sub] Multilayer Coatings
Author(s): L. F. Johnson; E. J. Ashley; T. M. Donovan; J. B. Franck; R. W. Woolever; R. Z. Dalbey
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Paper Abstract

Scanning electron microscopy (SEM) was used to identify four distinct laser damage mor-phologies in ZnSe/ThF4 multilayer mirrors. There were three types of defect-initiated damage morphologies. Oblong-shaped damage sites oriented perpendicular to the electric field vector of the laser were associated with particulates on or near the surface of the ZnSe/ThF4 multilayers. Circular-shaped damage sites were initiated by particulates embed-ded beneath the top ZnSe layer. Selective laser damage at pinholes was identified as the third defectinitiated damage morphology. In addition to defect-initiated damage, stress-related damage was indicated by cracks near or within laser damage craters and erosion sites. Selective laser damage at nodular growth defects in SiH/Si02 multilayers was also observed using SEM. Samples with different numbers of nodules were prepared in-house using RF-diode, reactive sputtering. The low-defect mirror had the highest laser damage onset, and the mirror with the highest number of nodules had the lowest laser damage onset.

Paper Details

Date Published: 3 September 1985
PDF: 13 pages
Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946354
Show Author Affiliations
L. F. Johnson, Naval Weapons Center (United States)
E. J. Ashley, Naval Weapons Center (United States)
T. M. Donovan, Naval Weapons Center (United States)
J. B. Franck, Naval Weapons Center (United States)
R. W. Woolever, Naval Weapons Center (United States)
R. Z. Dalbey, Naval Weapons Center (United States)

Published in SPIE Proceedings Vol. 0525:
Measurement and Effects of Surface Defects & Quality of Polish
Lionel R. Baker; Harold E. Bennett, Editor(s)

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