Share Email Print
cover

Proceedings Paper

Application Of IR Ellipsometry/Reflectometry To Surface Metrology
Author(s): Thomas A. Leonard; John S. Loomis; Jack B. Stubbs
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Comparison of ellipsometric and reflectance measurements provides information on the amount of Total Integrated Scatter (TIS) when the surface model is reasonably well known. This is possible because the ellipsometric data are not strongly affected by scattering whereas the measured reflectance is reduced below the "model based" value by an amount equal to the TIS. The ellipsometric data provide the information necessary to correctly fit the model parameters (n and k). This procedure is discussed and a combined ellipsometer/reflectometer is described. Results of measurements on a metal surface are presented.

Paper Details

Date Published: 3 September 1985
PDF: 3 pages
Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); doi: 10.1117/12.946353
Show Author Affiliations
Thomas A. Leonard, University of Dayton Research Institute (United States)
John S. Loomis, University of Dayton Research Institute (United States)
Jack B. Stubbs, University of Dayton Research Institute (United States)


Published in SPIE Proceedings Vol. 0525:
Measurement and Effects of Surface Defects & Quality of Polish
Lionel R. Baker; Harold E. Bennett, Editor(s)

© SPIE. Terms of Use
Back to Top