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Proceedings Paper

Optical Constants For 22 Thin Film Materials In The 10 eV To 500 eV Photon Energy Region
Author(s): D L Windt; VV Cash; M Scott; P Arendt; B Newnam; R F Fisher; A B Swartzlander; P Z Takacs; J M Pinneo; J B Kortright
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Paper Abstract

Reflectance measurements were used to derive the optical constants of 22 materials for 36 photon wavelengths from 24 Å to 1216 Å. The samples studied are thin films of the transition metals Ti, Zr, Nb, Mo, Ru, Rh, Pd, Hf, Ta, W, Re, Os, Ir, and Pt, the noble metals Ag and Au, and films of C, diamond, Al, Si, CVD-SiC and a-SiC. We describe the experiment and also the data reduction technique used to derive the optical constants from the reflectance versus incidence angle data. A summary of the results is presented.

Paper Details

Date Published: 11 July 1988
PDF: 8 pages
Proc. SPIE 0911, X-Ray and Vacuum Ultraviolet Interaction Data Bases, Calculations, and Measurements, (11 July 1988); doi: 10.1117/12.945484
Show Author Affiliations
D L Windt, Lockheed Palo Alto Research Lab (United States)
VV Cash, University of Colorado (United States)
M Scott, Los Alamos National Laboratory (United States)
P Arendt, Los Alamos National Laboratory (United States)
B Newnam, Los Alamos National Laboratory (United States)
R F Fisher, Solar Energy Research Institute (United States)
A B Swartzlander, Solar Energy Research Institute (United States)
P Z Takacs, Brookhaven National Laboratory (United States)
J M Pinneo, Crystallurne, Inc (United States)
J B Kortright, Lawrence Berkeley Lab (United States)


Published in SPIE Proceedings Vol. 0911:
X-Ray and Vacuum Ultraviolet Interaction Data Bases, Calculations, and Measurements
Nancy DelGrande; James A. R. Samson; David Y. Smith, Editor(s)

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