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Proceedings Paper

Integrated Microsensors: Design And Fabrication Constraints
Author(s): Rosemary L Smith
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Paper Abstract

This presentation addresses critical issues one faces in the design and fabrication of microsensors and associated 'on chip' circuitry. It focuses on the constraints which result from the merging of microelectronics and sensors to yield the integrated microsensor. Guidelines for successful microsensor design are given.

Paper Details

Date Published: 8 April 1988
PDF: 3 pages
Proc. SPIE 0904, Microsensors and Catheter-Based Imaging Technology, (8 April 1988); doi: 10.1117/12.945222
Show Author Affiliations
Rosemary L Smith, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 0904:
Microsensors and Catheter-Based Imaging Technology
Alan I. West, Editor(s)

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