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Proceedings Paper

Linbo3 Optical Waveguide Fabrication By Ti Indiffusion And Proton Exchange: Process, Performances And Stability
Author(s): C. Canali; A. Carnera; P. Mazzoldi; R. M. De La Rue
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Paper Abstract

Correlations between optical properties and structural modifications induced by the fabri cation procedures are reported for both Ti indiffused and proton exchanged LiNbO3 waveguides. Surface roughness and structural defects account for the dependence of the propagation losses on the diffusion time in Ti:LiNbO3 waveguides. The heavy lattice distortion induced by the high H concentration is related to the high in-plane scattering levels in proton exchang ed waveguides. Post annealing reduces lattice distortions and improves optical performances.

Paper Details

Date Published: 29 January 1985
PDF: 9 pages
Proc. SPIE 0517, Integrated Optical Circuit Engineering I, (29 January 1985); doi: 10.1117/12.945147
Show Author Affiliations
C. Canali, Istituto di Elettrotecnica ed Elettronica dell'Universita (Italy)
A. Carnera, Dipartimento di Fisica dell'Universita (Italy)
P. Mazzoldi, Dipartimento di Fisica dell'Universita (Italy)
R. M. De La Rue, Department of Electronics and Electrical Engineering (United Kingdom)


Published in SPIE Proceedings Vol. 0517:
Integrated Optical Circuit Engineering I
Daniel B. Ostrowsky; Sriram Sriram, Editor(s)

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