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Proceedings Paper

Waveguide Fabrication Techniques In AlGaAs/GaAs
Author(s): Robert G. Hunsperger
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Paper Abstract

The various techniques that have been used to fabricate waveguides in GaAs/GaAkAs are reviewed; including p-n junction, carrier-concentration-reduction, heteroepitaxial growth, and strip-loading methods. The results of this survey show that it is possible to produce waveguides in GaAs/GaAkAs with losses less than 2 dB/cm for wavelengths ranging from 1.06 to 10.6μm. In some cases losses as low as 1 dB/cm have been observed.

Paper Details

Date Published: 29 January 1985
PDF: 7 pages
Proc. SPIE 0517, Integrated Optical Circuit Engineering I, (29 January 1985); doi: 10.1117/12.945132
Show Author Affiliations
Robert G. Hunsperger, University of Delaware (United States)


Published in SPIE Proceedings Vol. 0517:
Integrated Optical Circuit Engineering I
Daniel B. Ostrowsky; Sriram Sriram, Editor(s)

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