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Proceedings Paper

Film Thickness Monitoring With A Fiber Optic Realtime Spectrometer
Author(s): H. E. Korth
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Paper Abstract

A computer integrated spectral sensor is described that allows simple interfacing with manufacturing and testing devices. Several applications are discussed.

Paper Details

Date Published: 12 November 1984
PDF: 4 pages
Proc. SPIE 0514, 2nd Intl Conf on Optical Fiber Sensors: OFS'84, (12 November 1984); doi: 10.1117/12.945086
Show Author Affiliations
H. E. Korth, IBM (Germany)


Published in SPIE Proceedings Vol. 0514:
2nd Intl Conf on Optical Fiber Sensors: OFS'84
Ralf Th. Kersten; Rainer Kist, Editor(s)

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