Share Email Print

Proceedings Paper

Comparison Of Roughness Measurements By Differential Scatter And Total Integrated Scatter
Author(s): John C. Stover; Bahram Hourmand; Jeffrey A. Kahler; Calvin H. Gillespie
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper discusses the problems involved in comparing the rms roughness values obtained from a plane of incidence differential scatterometer to those obtained from a TIS system. The theoretical justification for making the comparison and the importance of spatial frequency bandwidths are reviewed first. The two types of instruments are briefly described and referenced. Several practical problems relating to the types of samples that allow the comparison are presented. The comparison is independent of the surface height distribution (i.e., a Gaussian astribution is not required); however, because the data is taken in one plane only by the differential scatterometer only isotropic samples, one dimensional samples (grating like) or a combination of the two may be used to make the comparison. Then two less obvious mechanisms associated with TIS devices are discussed. These are the small angle scatter assumption and the angle of incidence variation at the detector. Both of these effects act to discriminate against high frequency roughness in the calculation of rms roughness from TIS data. Finally, some experimental comparisons of several samples are presented.

Paper Details

Date Published: 17 January 1985
PDF: 5 pages
Proc. SPIE 0511, Stray Radiation IV, (17 January 1985); doi: 10.1117/12.945027
Show Author Affiliations
John C. Stover, Montana State University (United States)
Bahram Hourmand, Montana State University (United States)
Jeffrey A. Kahler, Montana State University (United States)
Calvin H. Gillespie, Lawrence Livermore National Laboratory (United States)

Published in SPIE Proceedings Vol. 0511:
Stray Radiation IV
Robert P. Breault, Editor(s)

© SPIE. Terms of Use
Back to Top