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Proceedings Paper

On-Line Monitoring Of Surface Roughness By Using Laser
Author(s): Mitsuhito Kamei; Takahiko Inari
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Paper Abstract

This paper deals with a basic research on an on-line monitoring of surface roughness by using laser. The relation between an intensity distribution of the reflected laser light and the surface profile is studied. A function of the processed r.m.s. roughness is used, which is taken from the spatial filtering of the surface profile measured by stylus method. An experiment was carried out by using a rolled metallic sheet and pieces finished by an electrical discharge machine. The results show that the intensity distribution is approximately proportional to the r.m.s. roughness of a certain filterd surface profile. The experimental results are proved to be reasonable by theoretical analysis.

Paper Details

Date Published: 11 December 1984
PDF: 8 pages
Proc. SPIE 0508, Production Aspects of Single Point Machined Optics, (11 December 1984); doi: 10.1117/12.944962
Show Author Affiliations
Mitsuhito Kamei, Mitsubishi Electric Corporation (Japan)
Takahiko Inari, Mitsubishi Electric Corporation (Japan)

Published in SPIE Proceedings Vol. 0508:
Production Aspects of Single Point Machined Optics
Donald P. Brehm, Editor(s)

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