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Proceedings Paper

Inspection And Automation Systems For Test And Assembly
Author(s): John Mathews
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Paper Abstract

Machine vision systems have undergone dramatic changes in the last few years due to the rapid advances in microprocessors and specialized digital signal/image processing electronics. (1,2) This paper is a report of a alignment, inspection and measurement system, KLAASP, (KLA Automation System for Process Control). The applications of this machine vision system are initially directed toward the semiconductor test and assembly area where extensive optical alignment and inspection are required. (3,4)

Paper Details

Date Published: 4 December 1984
PDF: 4 pages
Proc. SPIE 0504, Applications of Digital Image Processing VII, (4 December 1984); doi: 10.1117/12.944848
Show Author Affiliations
John Mathews, KLA Instruments Corporation (United States)


Published in SPIE Proceedings Vol. 0504:
Applications of Digital Image Processing VII
Andrew G. Tescher, Editor(s)

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