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Proceedings Paper

Grating Interferometry For Positioning The X-Y Stages Of A Wafer Stepper
Author(s): L. Berger
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Paper Abstract

This paper relates the performances of an interferometry based upon a bidimensional grating taken as a reference. This interferometry permits to position the X-Y stage of a wafer stepper with a resolution comparable with a laser interferometer. The principle and the performances of an X-Y table controlled by this interferometer are presented.

Paper Details

Date Published: 12 December 1984
PDF: 5 pages
Proc. SPIE 0503, Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II, (12 December 1984); doi: 10.1117/12.944823
Show Author Affiliations
L. Berger, MATRA GCA (France)


Published in SPIE Proceedings Vol. 0503:
Application, Theory, and Fabrication of Periodic Structures, DiffractionGratings, and Moire Phenomena II
Jeremy M. Lerner, Editor(s)

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