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Proceedings Paper

Process Control For Sputter Deposition Of Low Emissivity Films In Large Scale Production
Author(s): Roy L. Bernardi; Steven J. Nadel
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Paper Abstract

Low emissivity coatings for commercial and residential construction uses are being produced every day on large scale, in-line sputter deposition systems. Under full production conditions, this equipment is capable of producing millions of square feet per year, of quality coatings, on glass sheets as large as 100" x 144". Heat mirror coatings of the dielectric sandwich type, with silver as the metal layer, present a special challenge in process control. To maintain emissivities below 0.15 requires delicate control of deposition conditions. Small variations in layer thicknesses can have dramatic effects on overall coating performance and characteristics. Film and glass side reflective color are especially sensitive to layer thickness variation. An indication of the effects of varying layer thicknesses on reflective color is included.

Paper Details

Date Published: 2 November 1984
PDF: 6 pages
Proc. SPIE 0502, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion III, (2 November 1984); doi: 10.1117/12.944781
Show Author Affiliations
Roy L. Bernardi, Airco Solar Products (United States)
Steven J. Nadel, Airco Solar Products (United States)


Published in SPIE Proceedings Vol. 0502:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion III
Carl M. Lampert, Editor(s)

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