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Proceedings Paper

Design Method For Ultra-High Resolution Linear CCD Imagers
Author(s): Larry Shey-Ping Sheu; Thanh Truong; Larry Yuzuki; Abdul Elhatem; Narayan Kadekodi
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Paper Abstract

This paper presents the design method to achieve ultra-high resolution linear imagers. This method utilizes advanced design rules and novel staggered bilinear photo sensor arrays with quadrilinear shift registers. Design constraint in the detector arrays and shift registers are analyzed. Imager architecture to achieve ultra-high resolution is presented. The characteristics of MTF, aliasing, speed, transfer efficiency and fine photolithography requirements associated with this architecture are also discussed. A CCD imager with advanced 1.5 um minimum feature size was fabricated. It is intended as a test vehicle for the next generation small sampling pitch ultra-high resolution CCD imager. Standard double-poly, two-phase shift registers were fabricated at an 8 um pitch using the advanced design rules. A special process step that blocked the source-drain implant from the shift register area was invented. This guaranteed excellent performance of the shift registers regardless of the small poly overlaps. A charge transfer efficiency of better than 0.99995 and maximum transfer speed of 8 MHz were achieved. The imager showed excellent performance. The dark current was less than 0.2 mV/ms, saturation 250 mV, adjacent photoresponse non-uniformity ± 4% and responsivity 0.7 V/ μJ/cm2 for the 8 μm x 6 μm photosensor size. The MTF was 0.6 at 62.5 cycles/mm. These results confirm the feasibility of the next generation ultra-high resolution CCD imagers.

Paper Details

Date Published: 8 November 1984
PDF: 5 pages
Proc. SPIE 0501, State-of-the-Art Imaging Arrays and Their Applications, (8 November 1984); doi: 10.1117/12.944649
Show Author Affiliations
Larry Shey-Ping Sheu, Xerox Corporation (United States)
Thanh Truong, Xerox Corporation (United States)
Larry Yuzuki, Xerox Corporation (United States)
Abdul Elhatem, Xerox Corporation (United States)
Narayan Kadekodi, Xerox Corporation (United States)

Published in SPIE Proceedings Vol. 0501:
State-of-the-Art Imaging Arrays and Their Applications
Keith N. Prettyjohns, Editor(s)

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