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Proceedings Paper

Large Scale In-Line Sputtering System For Magneto-Optical Data Storage Media
Author(s): G. Brauer; S. Muller; E. Schultheib; H.-P. D. Shieh; P. Wirz
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Paper Abstract

The LH A 400 in-line sputtering system for large scale production of magneto-optical disks is described. This system is based on a modular concept to realize different layer configurations of MO-disks. The deposition stations, loading and unloading chambers are separated by dynamic buffer modules to maintain a continuous flow of disk carriers and to guarantee the stability of the sputtering processes. Transmission and reflection spectra, coercivity and MO-signal of the coated disks are measured in real-time and fed back for on-line process control. Experimental results of a process development on dielectric (A1N and Si3N4) and magneto-optical (FeTbCo) thin films in a pilot machine are presented.

Paper Details

Date Published: 2 June 1988
PDF: 8 pages
Proc. SPIE 0899, Optical Storage Technology and Applications, (2 June 1988); doi: 10.1117/12.944618
Show Author Affiliations
G. Brauer, Leybold AG (Germany)
S. Muller, Leybold AG (Germany)
E. Schultheib, Leybold AG (Germany)
H.-P. D. Shieh, Carnegie-Mellon University (United States)
P. Wirz, Leybold AG (Germany)


Published in SPIE Proceedings Vol. 0899:
Optical Storage Technology and Applications
Donald B. Carlin; Albert A. Jamberdino; Yoshito Tsunoda, Editor(s)

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