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Proceedings Paper

Fabrication Of Miniature Lenses And Mirrors For InGaAsP/InP Lasers
Author(s): D Yap; Z L Liau; J N Walpole; V Diadiuk
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Paper Abstract

Lenses and mirrors of micrometer scale have been fabricated in the InGaAsP/InP heterostructure material. These microoptical components include two-dimensional flat and cylindrical end-mirrors which are a part of edge-emitting laser cavities, integrated 45° beam-deflectors which direct the output beam from edge-emitting lasers to emit perpendicular to the substrate surface, and large-numerical-aperture refractive and diffractive lenses for collimating light from the diode lasers. They were fabricated by etching, using both wet-chemical and dry processes, lithographically defined patterns. In many cases a mass-transport process was also used to smooth the etched structures.

Paper Details

Date Published: 2 June 1988
PDF: 5 pages
Proc. SPIE 0898, Miniature Optics and Lasers, (2 June 1988); doi: 10.1117/12.944556
Show Author Affiliations
D Yap, Massachusetts Institute of Technology (United States)
Z L Liau, Massachusetts Institute of Technology (United States)
J N Walpole, Massachusetts Institute of Technology (United States)
V Diadiuk, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 0898:
Miniature Optics and Lasers
Laurence E. Cramer; Gary T. Forrest; Chandrasekhar Roychoudhuri, Editor(s)

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