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Proceedings Paper

High Resolution Phase Measuring Laser Interferometric Microscope For Engineering Surface Metrology
Author(s): J F Biegen; R A Smythe
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Paper Abstract

A new three-dimensional, non-contact laser interference microscope* is described which uses computerized phase measurement interferometry to achieve sub-nanometer vertical resolution. Areas profiled range from 7.8mm x 5.7mm to 0.078mm x 0.057mm with a pixel sampling interval ranging from 27.0μm down to 0.271μm. Test surface reflectivity can range from less than 1% up to 100%. Turret mounted, parfocal objectives permit rapid magnification change. Laser illumination yields interference fringes throughout the entire depth of focus of each objective magnification permitting rapid fringe acquisition. Tip and tilt of the entire instrument head about the plane of the test surface eliminates feature walkoff from the field of view at high magnification. Three dimensional surface plots plus user selectable two dimensional profiles extracted from three dimensional data are displayed. Two dimensional autocovariance and spectral density analysis is available. Numeric output includes RMS, Ra, peak-valley, and radius of curvature. A track-ball directed interactive cursor scans analyzed data to give single pixel coordinates relative to a user defined origin.

Paper Details

Date Published: 12 July 1988
PDF: 10 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944551
Show Author Affiliations
J F Biegen, Zygo Corporation (United States)
R A Smythe, Zygo Corporation (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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