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Proceedings Paper

Scanning Soft X-Ray Microscopy
Author(s): John A Trail; Robert L Byer
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Paper Abstract

Soft x-ray microscopy allows high resolution imaging of wet biological samples. 100A resolution has been demonstrated with contact microscopy while to date scanning microscopes have achieved 750A resolution. The present state of soft x-ray microscopy is reviewed with emphasis on scanning systems. We compare the various combinations of soft x-ray sources and focusing optics for scanning microscopes and summarize the present performance of the three operating synchrotron / zone plate scanning microscopes. Finally, we describe the SLanford tabletop scanning soft x-ray microscope which uses a laser-produced plasma source with normal incidence mirror focusing optics.

Paper Details

Date Published: 12 July 1988
PDF: 6 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944544
Show Author Affiliations
John A Trail, Stanford University (United States)
Robert L Byer, Stanford University (United States)


Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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