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Proceedings Paper

Thermal And Photothermal Imaging On A Sub 100 Nanometer Scale
Author(s): C C Williams; H K Wickramasinghe
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Paper Abstract

A review is made of progress in high resolution near field thermal imaging. The Scanning Thermal Profiler, initially demonstrated as a surface profiler, has profiled aluminum films with sub 100 nanometer resolution. More recently, the thermal sensor has been used to map current induced heating of a surface with comparable resolution. Finally, photothermal imaging of laser heated surfaces has been demonstrated, with image structure well below 100 nanometers.

Paper Details

Date Published: 12 July 1988
PDF: 6 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944530
Show Author Affiliations
C C Williams, IBM, T.J. Watson Research Center (United States)
H K Wickramasinghe, IBM, T.J. Watson Research Center (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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