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Proceedings Paper

Acoustic Microscopy
Author(s): B T Khuri-Yakub
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Paper Abstract

Acoustic microscopy has been growing steadily since the development of the first microscope in the mid-seventies. Since that date, acoustic microscopes have been used as both qualitative tools for imaging, and quantitative tools for the characterization of materials. The frequency range, and thus resolution, of acoustic microscopes covers several decades which makes the methodology useful for examining materials with spatial resolutions ranging from millimeters to Angstroms. In this paper, we will review the principle of operation of the microscope, show some imaging results, and present some quantitative measurements of samples using both amplitude only and amplitude and phase measuring microscopes. We will also show some recent results of quantitative measurements of anisotropy and surface residual stress that are possible with new types of lenses.

Paper Details

Date Published: 12 July 1988
PDF: 11 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944528
Show Author Affiliations
B T Khuri-Yakub, Stanford University (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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