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Proceedings Paper

Deteriorating Effects Of Beam Truncation On Focus Sensing Systems
Author(s): Gregory Toker; Andrei Brunfeld; Joseph Shamir
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Paper Abstract

The optical profile measuring method described earlier was analyzed with the assumption of infinite lens apertures. A more detailed analysis shows that the presence of finite apertures induces a focal shift in addition to the well known effects on spot size and shape. The calculations lead to a modified design for the profilometer with better performance.

Paper Details

Date Published: 12 July 1988
PDF: 7 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944511
Show Author Affiliations
Gregory Toker, El-Op Electro-Optic Ind (Israel)
Andrei Brunfeld, Israel Institute of Technology (Israel)
Joseph Shamir, Israel Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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