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Proceedings Paper

Creating And Observing Surface Features With A Scanning Tunneling Microscope
Author(s): J Schneir; P K Hansma; V Elings; John Gurley; K Wickramasinghe; R Sonnenfeld
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Paper Abstract

Scanning Tunneling Microscopy (STM) can be used to perform lithography on a surface and to image the results of lithography performed using other techniques. We have imaged a 1 nm structure created with the STM on graphite, a 300 nm structure electrodeposited with the STM on gold, and a gold diffraction grating created using a diamond scribe. In addition we present atomic resolution images of graphite showing a surface reconstruction.

Paper Details

Date Published: 12 July 1988
PDF: 6 pages
Proc. SPIE 0897, Scanning Microscopy Technologies and Applications, (12 July 1988); doi: 10.1117/12.944501
Show Author Affiliations
J Schneir, University of California (United States)
P K Hansma, University of California (United States)
V Elings, Digital Instruments Inc (United States)
John Gurley, Digital Instruments Inc (United States)
K Wickramasinghe, IBM (United States)
R Sonnenfeld, IBM (United States)

Published in SPIE Proceedings Vol. 0897:
Scanning Microscopy Technologies and Applications
E. Clayton Teague, Editor(s)

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