Share Email Print

Proceedings Paper

Optical Techniques For In-Situ, Real-Time Detection Of Laser-Induced Damage
Author(s): P M Fauchet; I H Campbell
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We are building an optical laboratory in which three complementary optical techniques: Raman scattering, sur-face second harmonic generation and photoluminescence, will be used to observe in-situ, in real-time the cumulative structural changes that occur during repeated illumination of solid surfaces. Such changes may be beneficial as in sem-iconductor processing but in general are detrimental, as in laser-induced damage of optical components. The evolution of stress, crystallinity, surface electronic properties and of the type and number of defects will be correlated with the appearance of damage spots during illumination sequences with below threshold pulses. From this, the mechanisms of multiple pulse damage will emerge and prediction of failure in components will become possible.

Paper Details

Date Published: 27 June 1988
PDF: 8 pages
Proc. SPIE 0895, Laser Optics for Intracavity and Extracavity Applications, (27 June 1988); doi: 10.1117/12.944446
Show Author Affiliations
P M Fauchet, Princeton University (United States)
I H Campbell, Princeton University (United States)

Published in SPIE Proceedings Vol. 0895:
Laser Optics for Intracavity and Extracavity Applications
Philippe M. Fauchet; Karl H. Guenther, Editor(s)

© SPIE. Terms of Use
Back to Top