Share Email Print
cover

Proceedings Paper

Diagnostic Techniques For Studying Excimer Laser Kinetics
Author(s): W D Kimura; F Kannari; J F Seamans; D R Guyer
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Several novel diagnostic techniques have been used to analyze the laser kinetics occurring in electron-beam pumped excimer lasers. Described are a quadrature interferometer for measuring time-dependent electron densities, an overtone absorption technique for measuring the HC1 concentration, a broadband dye laser system for measuring the spectrally resolved gain in XeF, and a hook interferometer for measuring time-dependent excited state densities. These techniques can also be applied to other non-excimer lasers.

Paper Details

Date Published: 12 July 1988
PDF: 8 pages
Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); doi: 10.1117/12.944389
Show Author Affiliations
W D Kimura, Spectra Technology, Inc. (United States)
F Kannari, Spectra Technology, Inc. (United States)
J F Seamans, Spectra Technology, Inc. (United States)
D R Guyer, Spectra Technology, Inc. (United States)


Published in SPIE Proceedings Vol. 0894:
Gas Laser Technology
Peter P. Chenausky; Roland A. Sauerbrey; James H. Tillotson, Editor(s)

© SPIE. Terms of Use
Back to Top