Share Email Print

Proceedings Paper

Systems Approach To An Industrial Excimer Laser
Author(s): Gary K Klauminzer
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Industrial applications for excimer lasers are developing at an increasing pace, and users are defining the laser requirements for these applications. At the same time, excimer laser manufacturers are responding with lasers intended to meet these requirements. There is a strong tendency, however, for manufacturers to offer existing or slightly modified general purpose "scientific" lasers, rather than develop entirely new lasers. Such an approach is risky because users demand far more than can be delivered by "scientific" designs. A far better approach is to consider the laser as part of an industrial system, define the laser requirements for this system, then design a laser to meet these requirements without the constraints of existing designs. This paper describes the steps Questek has taken to define and develop industrial excimer lasers.

Paper Details

Date Published: 12 July 1988
PDF: 3 pages
Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); doi: 10.1117/12.944384
Show Author Affiliations
Gary K Klauminzer, Questek Inc (United States)

Published in SPIE Proceedings Vol. 0894:
Gas Laser Technology
Peter P. Chenausky; Roland A. Sauerbrey; James H. Tillotson, Editor(s)

© SPIE. Terms of Use
Back to Top