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Proceedings Paper

Industrial Excimer Lasers: Continous Operation And Proven Applications
Author(s): Lindsay Austin; Dirk Basting; Hans-Jurgen Kahlert; Wolfgang Muckenheim; Ulrich Rebhan
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Paper Abstract

Recent tests confirm that commercially available excimer lasers meet most industrial requirements including the most strenuous - continuous constant power operation at maximum specified power ratings. Test results include lifetime data plus the determination of maintenance and operating costs. A few proven industrial applications are reviewed as well as the field experience on their production lines. The field and test data compare favorably.

Paper Details

Date Published: 12 July 1988
PDF: 7 pages
Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); doi: 10.1117/12.944382
Show Author Affiliations
Lindsay Austin, Lambda Physik (United States)
Dirk Basting, Lambda Physik (United States)
Hans-Jurgen Kahlert, Lambda Physik (United States)
Wolfgang Muckenheim, Lambda Physik (United States)
Ulrich Rebhan, Lambda Physik (United States)


Published in SPIE Proceedings Vol. 0894:
Gas Laser Technology
Peter P. Chenausky; Roland A. Sauerbrey; James H. Tillotson, Editor(s)

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