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Proceedings Paper

Extreme-Ultraviolet Multilayer Mirror Performance: Recent Test Results
Author(s): R. C. Catura; E. G. Joki; T. E. Whittemore; W. J. Brookover; M. S. Giampapa
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Paper Abstract

This paper describes some of our recent progress in laboratory research aimed at fabricating multilayers for imaging applications at EUV wavelengths. Some of the equipment available in our laboratory for multilayer research is described and results of some calculations that aided in design of the multilayers and in the selection of materials are discussed. Finally, the results of multilayer deposition on both flat substrates and figured optical surfaces are presented and the visible light test of a system for investigating the normal incidence imaging properties of multilayer optics is described.

Paper Details

Date Published: 18 May 1988
PDF: 9 pages
Proc. SPIE 0879, Sensing, Discrimination, and Signal Processing and Superconducting Materials and Intrumentation, (18 May 1988); doi: 10.1117/12.943971
Show Author Affiliations
R. C. Catura, Lockheed Palo Alto Research Lab (United States)
E. G. Joki, Lockheed Palo Alto Research Lab (United States)
T. E. Whittemore, Lockheed Palo Alto Research Lab (United States)
W. J. Brookover, Lockheed Palo Alto Research Lab (United States)
M. S. Giampapa, National Optical Astronomy Observatories (United States)


Published in SPIE Proceedings Vol. 0879:
Sensing, Discrimination, and Signal Processing and Superconducting Materials and Intrumentation
James A. Ionson; Roy Nichols, Editor(s)

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