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Proceedings Paper

Multilevel DLC (Diamondlike Carbon) Capacitor Structure
Author(s): J. L. Davidson; C. Ellis; T. Baginski
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Paper Abstract

The dielectric properties of DLC films formed by bias plasma enhanced CVD of methane are examined. Capacitors with nickel, copper, aluminum, silicon and carbon film electrodes to the PLC film were formed. Resistivity and dielectric strength were determined, in relation to substrate and plasma energy and bias. PLC films with breakdown over 10 Volts/cm a, d CF (Dissipation Factor) less than .01 were used in capacitor structures. Five layer structures were evaluated.

Paper Details

Date Published: 6 April 1988
PDF: 5 pages
Proc. SPIE 0871, Space Structures, Power, and Power Conditioning, (6 April 1988); doi: 10.1117/12.943682
Show Author Affiliations
J. L. Davidson, Auburn University (United States)
C. Ellis, Auburn University (United States)
T. Baginski, Auburn University (United States)

Published in SPIE Proceedings Vol. 0871:
Space Structures, Power, and Power Conditioning
Raymond F. Askew, Editor(s)

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