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Proceedings Paper

Dielectrics For Optoelectronic Device Applications On The III-V Compounds
Author(s): Derek L Lile
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Paper Abstract

The III -V compound semiconductors comprise an important class of materials for optoelectronic device applications. Despite this, it has not as yet proven possible to form insulators on any of these materials with a quality comparable to what can be achieved on Silicon using thermal Si02. This in turn has resulted in severe restrictions in device and integrated circuit development due to the reduced design flexibility imposed by this more limited technology base.

Paper Details

Date Published: 31 March 1988
PDF: 16 pages
Proc. SPIE 0869, Technologies for Optoelectronics, (31 March 1988); doi: 10.1117/12.943618
Show Author Affiliations
Derek L Lile, Colorado State University (United States)

Published in SPIE Proceedings Vol. 0869:
Technologies for Optoelectronics
Jean M. Bulabois; Roy F. Potter, Editor(s)

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