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Proceedings Paper

Surface Micro-Topography By Automatic Processing Of Projected Interference Fringes
Author(s): R. W. Wygant; S. P. Almeida; O. D.D. Soares
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Paper Abstract

Micro-topographic analysis of surfaces, particularly of the non-optical type are of great interest in various areas of science and technology. A technique and results on topographic mapping of surfaces are presented. Essentially, the method uses advanced software for image processing of the pattern of the contouring fringes resulting on the surface from illumination by collimated interference fringes. Inherent noise inconvenients are overcome by specially conceived algorithms leading to a best fit symbolic fringe pattern (ideal contouring fringes). From the topological map, statistical parameters are evaluated to characterize the surface. These include: range and distribution of surface heights, average roughness and the auto-correlation function of the surface.

Paper Details

Date Published: 1 June 1988
PDF: 5 pages
Proc. SPIE 0863, Industrial Optoelectronic Measurement Systems Using Coherent Light, (1 June 1988); doi: 10.1117/12.943492
Show Author Affiliations
R. W. Wygant, Virginia Polytechnic Institute and State University (United States)
S. P. Almeida, Virginia Polytechnic Institute and State University (United States)
O. D.D. Soares, INIC-Centro de Fisica (Portugal)


Published in SPIE Proceedings Vol. 0863:
Industrial Optoelectronic Measurement Systems Using Coherent Light
William F. Fagan, Editor(s)

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