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Proceedings Paper

System LSM - 87 For The Laser Micromachining Investigation
Author(s): Marian Nowicki; Zygmunt Niechoda
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Paper Abstract

A versatile system LSM - 87 have been developed for the investigation of laser micromachining. The system can operate with many types of lasers. Laser trimming of piezoelectric filters is an example of practical application of this system.

Paper Details

Date Published: 19 October 1987
PDF: 2 pages
Proc. SPIE 0859, Laser Technology II, (19 October 1987); doi: 10.1117/12.943373
Show Author Affiliations
Marian Nowicki, Technical University of Warsaw (Poland)
Zygmunt Niechoda, Technical University of Warsaw (Poland)


Published in SPIE Proceedings Vol. 0859:
Laser Technology II

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