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Proceedings Paper

XeCl Excimer Laser For Micro - Machining Of Materials: Preliminary Theoretical And Experimental Works.
Author(s): Leszek Iwanejko; Ludwik Pokora; Miroslaw Stefanski; Zbigniew Ujda
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Paper Abstract

The paper presents the results of preliminary investigations, both theoretical and experimental, of XeC1 excimer laser pumped by transverse electric discharge with UU preionization. The medium was a mixture of gases He-Xe-HC1. A theoretical model of the XeC1 laser was worked out and a lot of laser parameters calculations were done. In the same time an excimer laser operating on the mixture He-Xe-HC1 was started, the generation of laser radiation was of energy about 20mJ.

Paper Details

Date Published: 19 October 1987
PDF: 6 pages
Proc. SPIE 0859, Laser Technology II, (19 October 1987); doi: 10.1117/12.943372
Show Author Affiliations
Leszek Iwanejko, Institute of Plasma Physics and Laser Microfusion (Poland)
Ludwik Pokora, Institute of Plasma Physics and Laser Microfusion (Poland)
Miroslaw Stefanski, Institute of Plasma Physics and Laser Microfusion (Poland)
Zbigniew Ujda, Institute of Plasma Physics and Laser Microfusion (Poland)


Published in SPIE Proceedings Vol. 0859:
Laser Technology II

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