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Proceedings Paper

Aim-An Automated Inspection Microscope For Measuring Critical Dimensions
Author(s): Ronald J. LeMaster
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Paper Abstract

An automated system for measuring critical dimensions of hard disk heads in a production environment has been developed and put to use successfully in manufacturing. It measures features ranging in size from less than a micron to more than half a millimeter. The Automated Inspection Microscope (AIM), makes reliable measurements of these dimensions seven to nine times faster and with about twice the precision than the conventional methods which it replaced. A special purpose region building and merging algorithm produces results which are very dependable when contaminants, scratches or chips are present along with the feature to be measured. The system inspects loads of ninety six heads at a time with little or no operator intervention. This paper discusses the hardware components of the system, its programming, and its role as part of a parts tracking and inspection system. Particular attention will be given to the algorithms and techniques used in measuring the head gaps, which are are in the micron size range.

Paper Details

Date Published: 15 October 1984
PDF: 9 pages
Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); doi: 10.1117/12.943046
Show Author Affiliations
Ronald J. LeMaster, IBM Thomas J. Watson Research Center (United States)

Published in SPIE Proceedings Vol. 0480:
Integrated Circuit Metrology II
Diana Nyyssonen, Editor(s)

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