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Proceedings Paper

New Sensor System For Optoelectronic Microprofilometry
Author(s): H. J. Warnecke; R.J. Ahlers; H. Kim
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Paper Abstract

An optoelectronic sensor system will be presented that measures distances in the range of micrometers. It is based on a triangulation principle and is expected to be integrated into coordinate mea-surement systems for high precision measurement tasks. The system consists of a laser, a linear CCD-array and a special optical system. Thus it is possible to measure complex workpieces that could not be evaluated by tactile means. Special attention is directed to surface roughness and surface tilt. These factors influence the results obtained during a scanning cycle.

Paper Details

Date Published: 22 March 1988
PDF: 7 pages
Proc. SPIE 0849, Automated Inspection and High-Speed Vision Architectures, (22 March 1988); doi: 10.1117/12.942845
Show Author Affiliations
H. J. Warnecke, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
R.J. Ahlers, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)
H. Kim, Fraunhofer-Institute for Manufacturing Engineering and Automation (Germany)


Published in SPIE Proceedings Vol. 0849:
Automated Inspection and High-Speed Vision Architectures
Rolf-Juergen Ahlers; Michael J. W. Chen, Editor(s)

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