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Proceedings Paper

Novel Operational Regime Of High-Efficiency KrF Lasers
Author(s): Minoru Obara; Tomoo Fujioka; Fumihiko Kannari; Akira Suda
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Paper Abstract

The novel operational regime of high-efficiency KrF lasers is presented. The excitation sources are intense electron beams and intense proton beams. Theoretical evaluation of electron-beam-excited KrF laser using one atmospheric-pressure, argon-free mixtures showed that by using high-excitation-rate and shorter-excitation-pulsewidth pumping, higher intrinsic laser efficiency than conventional argon-rich, high-pressure mixtures is attainable. The experimental results are also presented.

Paper Details

Date Published: 15 August 1984
PDF: 5 pages
Proc. SPIE 0476, Excimer Lasers: Their Applications & New Frontiers in Lasers, (15 August 1984); doi: 10.1117/12.942566
Show Author Affiliations
Minoru Obara, Keio University (Japan)
Tomoo Fujioka, Keio University (Japan)
Fumihiko Kannari, Keio University (Japan)
Akira Suda, Keio University (Japan)

Published in SPIE Proceedings Vol. 0476:
Excimer Lasers: Their Applications & New Frontiers in Lasers
Ronald W. Waynant, Editor(s)

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