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Proceedings Paper

Temperature Measurement Utilizing Hydrogenated Amorphous Silicon Films
Author(s): L.C. Guedes Valente; S. S Camargo; E. A. Soares
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Paper Abstract

In this work the feasibility of utilizing hydrogenated amorphous silicon (a-Si:H) films in optical fiber temperature sensors is demonstrated. In this sensor, a-Si:H films are deposited from the glow discharge decomposition of silane gas directly on fiber ends, followed by an aluminum layer obtained by vacuum evaporation. In this manner, the a-Si:H acts like a low-pass filter which cut-off frequency is temperature dependent, modulating the light intensity wich is reflected back into the fiber. This arrangement provides excelent mechanical rigidity and minimum dimensions, limited only by the fiber diameter. Preliminary results, using films deposited at 250°C and a HeNe laser as light source, showed a linear 50% variation in the detected signal, for a 50° C to 200°C temperature variation. In order to obtain similar effects for a 0.8μm LED, thermal annealed films are used.

Paper Details

Date Published: 23 March 1988
PDF: 5 pages
Proc. SPIE 0838, Fiber Optic and Laser Sensors V, (23 March 1988); doi: 10.1117/12.942514
Show Author Affiliations
L.C. Guedes Valente, CEPEL (Brasil)
S. S Camargo, Universidade Federal do Rio de Janeiro (Brasil)
E. A. Soares, Universidade Federal Fluminense (Brasil)

Published in SPIE Proceedings Vol. 0838:
Fiber Optic and Laser Sensors V
Ramon P. DePaula; Eric Udd, Editor(s)

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