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Proceedings Paper

High Accuracy Phase Measurement In Real Time
Author(s): Johannes Schwider; Regina Burow; Karl-Edmund Elssner; Jurgen Grzanna; Reiner Spolaczyk
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Paper Abstract

Real time interferometry using the intensities at discrete reference phase values equally distributed over one fringe period is described. Principle, experimental setup and test examples (plane and spherical surfaces, optical systems) are discussed. Further, some error causes are covered, compensation techniques described and experimentally proofed

Paper Details

Date Published: 18 January 1985
PDF: 4 pages
Proc. SPIE 0473, Symposium Optika '84, (18 January 1985); doi: 10.1117/12.942412
Show Author Affiliations
Johannes Schwider, Zentralinstitut fur Optik und Spektroskopie der AdW (Germany)
Regina Burow, Zentralinstitut fur Optik und Spektroskopie der AdW (Germany)
Karl-Edmund Elssner, Zentralinstitut fur Optik und Spektroskopie der AdW (Germany)
Jurgen Grzanna, Zentralinstitut fur Optik und Spektroskopie der AdW (Germany)
Reiner Spolaczyk, Zentralinstitut fur Optik und Spektroskopie der AdW (Germany)


Published in SPIE Proceedings Vol. 0473:
Symposium Optika '84
Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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